Abstract
Recent studies have shown that an oxidized vacuum chamber has much better outgassing characteristics than an unoxidized one. However, the chemical composition of the vacuum chamber surface has not been fully characterized yet. Therefore, we employed photoemission spectroscopy using synchrotron radiation to study the stainless-steel surface as a function of oxygen exposure and annealing temperature. 143 eV photon energy was used to increase the surface sensitivity and the intensity of the Fe 3p and Cr 3p. This experiment was done at the 2B1 spherical grating monochromator (SGM) beamline at the Pohang Accelerator Laboratory.
| Original language | English |
|---|---|
| Pages (from-to) | 327-333 |
| Number of pages | 7 |
| Journal | Journal of Electron Spectroscopy and Related Phenomena |
| Volume | 101-103 |
| DOIs | |
| State | Published - 1999 |
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