The deposition of Sm₁Ba₂Cu₃O_7-δ on SrTiO₃ using co-evaporation method

The SmBCO(Sm₁Ba₂Cu₃O_7-δ) films were deposited on SrTiO₃ substrates using co-evaporation method. The deposition system was specially designed, that is named evaporation using drum in dual chambers, as the following features. The deposition system consists of reaction chamber and evaporation one. The role of reaction chamber is for the deposited materials to react with oxygen gas, and that of the evaporation chamber is to evaporate the composing elements of SmBCO, respectively. The composition ratio of SmBCO is controlled by the deposition rate of each element. The drum of 50 cm of diameter and 72 cm of length is located between the reaction chamber and the evaporation chamber. By rotating the drum, deposition and reaction process are repeated. In this system, SmBCO films were deposited on SrTiO₃ single crystal substrates. We obtained I_c and J_c results of 83.3 A/cm and 2.1 MA/cm² at 77 K in self-field.