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Transport of negatively charged particles by E × B drift in silane plasmas

  • Y. Maemura*
  • , S. C. Yang
  • , H. Fujiyama
  • *Corresponding author for this work
  • Nagasaki University

Research output: Contribution to journalJournal articlepeer-review

Abstract

The motion of dust particles in glow discharge plasmas is influenced by the applied magnetic field, B, perpendicular to the discharge electric field, E. The negatively charged particles in a weakly magnetized plasma can be transported by the ambipolar electric field due to the E × B drift of the magnetized electrons. In this paper we propose a transport model to indicate the behavior of dust particles and evaluate "the ambipolar E × B drift" in weakly magnetized plasmas, in which only electrons can be magnetized, in terms of the drift velocities of charged particles (electrons, ions and negatively charged massive particles) calculated from the equations of motion. The calculation results in the present model agree qualitatively with the experimental results.

Original languageEnglish
Pages (from-to)1351-1358
Number of pages8
JournalSurface and Coatings Technology
Volume98
Issue number1-3
DOIs
StatePublished - 1998.01

Keywords

  • Drift velocity
  • E & B drift
  • Large area amorphouse silicon thin film
  • Magnetized plasma CVD
  • Particle transport

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