Two-Dimensional Dopant Profiling in p+/n Junctions Using Scanning Electron Microscope Coupled with Selective Electrochemical Etching

Research output: Contribution to journal › Journal article › peer-review

Original language	Korean
Journal	Electronic Materials Letters
State	Published - 2010.06.1

Cite this

@article{fb32efc0023047238a7543af3d5277e7,

title = "Two-Dimensional Dopant Profiling in p+/n Junctions Using Scanning Electron Microscope Coupled with Selective Electrochemical Etching",

author = "Kyu-Hwan Shim and Chel-Jong Choi",

year = "2010",

month = jun,

day = "1",

language = "Korean",

journal = "Electronic Materials Letters",

issn = "1738-8090",

}