Two-dimensional dopant profiling in POCl 3-diffused n+ emitter of textured silicon solar cells

Chel Jong Choi; Jin Sung Kim; Kyungwon Moon; Yeon Ho Kil; Young Woo Ok; Ajeet Rohatgi; Sung Eun Park; Dong Hwan Kim

doi:10.1109/PVSC.2011.6186542

Two-dimensional dopant profiling in POCl ₃-diffused n+ emitter of textured silicon solar cells

Chel Jong Choi^*
, Jin Sung Kim
, Kyungwon Moon
, Yeon Ho Kil
, Young Woo Ok
, Ajeet Rohatgi
, Sung Eun Park
, Dong Hwan Kim

^*Corresponding author for this work

Department of Semiconductor Science and Technology

Research output: Contribution to conference › Conference paper › peer-review

3 Scopus citations

Abstract

We investigated two-dimensional dopant distribution in POCl ₃-diffused n+ emitter formed on textured Si solar cells using transmission electron microscopy (TEM) combined with selective chemical etching. TEM and simulation results demonstrate that convex and concave regions of a pyramid in the textured Si surface show deeper and shallower junctions, respectively. By considering a strong dependency of phosphorus (P) diffusion on the Si interstitials, the abnormal profile of n+ emitter in the textured Si surface could be attributed to the inhomogeneous distribution of Si interstitials caused by the geometry of the pyramid texture.

Original language	English
Title of host publication	Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011
Pages	2858-2860
Number of pages	3
DOIs	https://doi.org/10.1109/PVSC.2011.6186542
State	Published - 2011
Event	37th IEEE Photovoltaic Specialists Conference, PVSC 2011 - Seattle, WA, United States Duration: 2011.06.19 → 2011.06.24

Publication series

Name	Conference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)	0160-8371

Conference

Conference	37th IEEE Photovoltaic Specialists Conference, PVSC 2011
Country/Territory	United States
City	Seattle, WA
Period	11.06.19 → 11.06.24

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Quacquarelli Symonds(QS) Subject Topics

Engineering - Mechanical
Computer Science & Information Systems
Engineering - Electrical & Electronic
Engineering - Petroleum

Access to Document

10.1109/PVSC.2011.6186542

Cite this

Choi, C. J., Kim, J. S., Moon, K., Kil, Y. H., Ok, Y. W., Rohatgi, A., Park, S. E., & Kim, D. H. (2011). Two-dimensional dopant profiling in POCl ₃-diffused n+ emitter of textured silicon solar cells. In Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011 (pp. 2858-2860). Article 6186542 (Conference Record of the IEEE Photovoltaic Specialists Conference). https://doi.org/10.1109/PVSC.2011.6186542

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title = "Two-dimensional dopant profiling in POCl 3-diffused n+ emitter of textured silicon solar cells",

abstract = "We investigated two-dimensional dopant distribution in POCl 3-diffused n+ emitter formed on textured Si solar cells using transmission electron microscopy (TEM) combined with selective chemical etching. TEM and simulation results demonstrate that convex and concave regions of a pyramid in the textured Si surface show deeper and shallower junctions, respectively. By considering a strong dependency of phosphorus (P) diffusion on the Si interstitials, the abnormal profile of n+ emitter in the textured Si surface could be attributed to the inhomogeneous distribution of Si interstitials caused by the geometry of the pyramid texture.",

author = "Choi, \{Chel Jong\} and Kim, \{Jin Sung\} and Kyungwon Moon and Kil, \{Yeon Ho\} and Ok, \{Young Woo\} and Ajeet Rohatgi and Park, \{Sung Eun\} and Kim, \{Dong Hwan\}",

year = "2011",

doi = "10.1109/PVSC.2011.6186542",

language = "English",

isbn = "9781424499656",

series = "Conference Record of the IEEE Photovoltaic Specialists Conference",

pages = "2858--2860",

booktitle = "Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011",

note = "37th IEEE Photovoltaic Specialists Conference, PVSC 2011 ; Conference date: 19-06-2011 Through 24-06-2011",

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Choi, CJ, Kim, JS, Moon, K, Kil, YH, Ok, YW, Rohatgi, A, Park, SE & Kim, DH 2011, Two-dimensional dopant profiling in POCl ₃-diffused n+ emitter of textured silicon solar cells. in Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011., 6186542, Conference Record of the IEEE Photovoltaic Specialists Conference, pp. 2858-2860, 37th IEEE Photovoltaic Specialists Conference, PVSC 2011, Seattle, WA, United States, 11.06.19. https://doi.org/10.1109/PVSC.2011.6186542

Two-dimensional dopant profiling in POCl ₃-diffused n+ emitter of textured silicon solar cells. / Choi, Chel Jong; Kim, Jin Sung; Moon, Kyungwon et al.
Program - 37th IEEE Photovoltaic Specialists Conference, PVSC 2011. 2011. p. 2858-2860 6186542 (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Contribution to conference › Conference paper › peer-review

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AU - Ok, Young Woo

AU - Rohatgi, Ajeet

AU - Park, Sung Eun

AU - Kim, Dong Hwan

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