Two step growth of high quality long n-GaN:Si nanowires using μ-GaN seed on Si(111) by metalorganic chemical vapor deposition

  • Min Hee Kim
  • , Ji Hyeon Park
  • , Hee Il Yoo
  • , Suthan Kissinger
  • , Jin Soo Kim
  • , Byung June Baek
  • , Cheul Ro Lee*
  • *Corresponding author for this work

Research output: Contribution to journalJournal articlepeer-review

Abstract

A two-step growth method for growing high quality long n-GaN:Si nanowires (NWs) on Si(111) substrates using metalorganic chemical vapor deposition (MOCVD) was developed. In the primary step μ-GaN seeds were grown at 710 C by pulsed growth method using MOCVD and in the secondary stage, we suitably increased the growth temperature to 950 C in order to grow the high quality long n-GaN:Si NWs by continuous flow mode. We grew n-GaN:Si NWs at various pairs of μ-GaN seed so as to examine its effect on the growth rate. The density and length of n-GaN:Si NWs were improved with the increase of seeds up to 10 pairs. The number of seed pairs determines the density and length of n-GaN:Si NWs, but they did not affect its diameter directly. Field emission scanning electron microscopy, X-ray diffraction, photoluminescence, cathodoluminescence and high-resolution transmission electron microscopy were used to characterize the specimens.

Original languageEnglish
Pages (from-to)58-63
Number of pages6
JournalThin Solid Films
Volume548
DOIs
StatePublished - 2013.12.2

Keywords

  • III-nitrides semiconductors
  • Metalorganic chemical deposition
  • n-GaN:Si
  • Nanowires
  • Seeding

Quacquarelli Symonds(QS) Subject Topics

  • Materials Science
  • Physics & Astronomy

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