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Visible luminescence of nanocrystalline AlN:Er thin film by co-deposition of AlN, Er, and SiO2

  • J. W. Lim*
  • , W. Takayama
  • , Y. F. Zhu
  • , J. W. Bae
  • , J. F. Wang
  • , S. Y. Ji
  • , K. Mimura
  • , J. H. Yoo
  • , M. Isshiki
  • *Corresponding author for this work
  • Tohoku University
  • Japan Radio Corporation
  • National NanoFab Center

Research output: Contribution to journalJournal articlepeer-review

Abstract

We report a visible luminescence of Er3+ ions in an amorphous-nanocrystalline AlN:Er thin film prepared by co-deposition using AlN, Er, and SiO2 targets. A PL emission spectrum of Er3+ in the AlN:Er film annealed at 750 °C showed a strong bluish green emission of Er3+ in the amorphous-nanocrystalline AlN:Er thin film, which is attributed to the intra-4fEr3+ transitions of 2H11/2 4I15/2 and 4F7/2 4I15/2. It was found that crystallite diameters were between 3 and 5 nm by high-resolution transmission electron microscopy. The occurrence of the strong Er3+ emission in the annealed AlN:Er thin film with a mixture of amorphous and nanocrystalline phases may be contributed to an increase in the number of excitation Er3+ centers and a presence of oxygen related to Er3+ excitation and recombination process in the AlN:Er thin film.

Original languageEnglish
Pages (from-to)236-239
Number of pages4
JournalCurrent Applied Physics
Volume7
Issue number3
DOIs
StatePublished - 2007.03

Keywords

  • Aluminium nitride
  • Deposition
  • Erbium
  • Luminescence
  • Thin film

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